Tag: pneumatic vortex coolerventuri

Spot Cooling Solutions for Semiconductor Manufacturing: How EXAIR Vortex Tubes Improve Process Reliability

Published on by Jordan T ShouseLeave a comment

Semiconductor manufacturing is one of the most demanding industrial environments in the world. From wafer fabrication and lithography to inspection, packaging, and testing, process stability often depends on maintaining precise temperature control. Even minor temperature fluctuations can impact yield, equipment performance, and product quality.

As semiconductor facilities continue to increase throughput and process complexity, engineers are constantly evaluating cooling solutions that improve reliability while minimizing maintenance requirements. One technology that has gained traction in targeted cooling applications is the vortex tube.

What Is a Vortex Tube?

A vortex tube is a compact device that converts compressed air into two separate air streams—one hot and one cold—without the use of electricity, refrigerants, or moving parts.

EXAIR vortex tubes utilize this principle to generate cold air temperatures as much as 100°F (56°C) below the inlet compressed air temperature. The resulting cold air stream can be directed precisely where cooling is required, providing an efficient solution for localized heat management.

Because vortex tubes contain no moving components, they offer exceptional reliability in environments where maintenance access is limited or contamination concerns are critical.

Semiconductor Applications for Vortex Tube Cooling

Cooling Vision and Inspection Systems

Automated optical inspection systems rely on cameras, sensors, and electronic components that can generate heat during continuous operation. Excessive temperatures may affect measurement accuracy or shorten component life.

Vortex tubes provide a simple method of delivering clean, cold air directly to sensitive electronics, helping maintain stable operating conditions without introducing liquid cooling systems.

Wafer Handling and Processing Equipment

Many wafer handling systems contain motors, drives, sensors, and control electronics operating in confined spaces. Localized heat buildup can lead to premature component wear and unexpected downtime.

Targeted vortex tube cooling can help remove heat from critical areas while avoiding the complexity associated with chilled water loops or mechanical refrigeration systems.

Cooling During Semiconductor Testing

Testing equipment often runs continuously and generates substantial heat loads. Maintaining consistent operating temperatures helps ensure repeatable test results and improves equipment reliability.

Vortex tubes can be deployed to cool fixtures, instrumentation, and electronic assemblies where traditional cooling methods may be difficult to implement.

Packaging and Assembly Operations

Semiconductor packaging processes frequently utilize adhesives, coatings, and thermal interface materials that can be sensitive to temperature variations. Cold air generated by a vortex tube can assist with process stabilization, spot cooling, and accelerated cooling between production steps.

Advantages of EXAIR Vortex Tubes

No Moving Parts, Clean Operation, Compact Installation, Instant Cooling, Reliable Operation in Harsh Environments

The simplicity of vortex tube technology makes it particularly attractive for applications involving vibration, dust, or challenging operating conditions where conventional cooling equipment may struggle.

The semiconductor industry depends on precision, repeatability, and uptime. EXAIR vortex tubes provide a straightforward and dependable method for localized cooling without the complexity of mechanical refrigeration. For engineers seeking a low-maintenance solution to cool electronics, sensors, fixtures, and process equipment, vortex tube technology remains a proven option for improving thermal control in critical semiconductor manufacturing operations.

Jordan Shouse
Application Engineer
E: JordanShouse@exair.com
O: (513) 671‑3322
F: (513) 671‑3363
A: 11510 Goldcoast Dr Cincinnati OH 45249
www.exair.com

Find time on my calendar by scheduling a meeting here.

Vortex Tubes For Spot Cooling Processes

Published on by Al WooffittLeave a comment

EXAIR’s Vortex Tubes are a great product for many cooling applications. When supplied with a clean and moisture-free source of compressed air, they will generate two streams of airflow, one hot and one cold. They are a low-cost and reliable solution, capable of producing temperatures ranging from -50°F to +260°F. We have flow rates from 2 SCFM to 150 SCFM, producing refrigeration over 10,000btu/hr.

We also have several other product lines that are great for cooling, like our Air Knives or Air Amplifiers. So, why would you choose a Vortex Tube? Our Air Knives and Amplifiers cool primarily by moving large volumes of ambient air. If you have a 400°F part that needs cooling to under 100°F, then hitting it with large amounts of 70°F ambient air is going to rapidly bring the temperature down. This does mean that there is a limit to how low of a temperature you can achieve with these products; our Air Knives and Amplifiers won’t be able to cool below ambient temperatures. Our Vortex Tubes, on the other hand, with temperatures as low as -50°F, can provide much more powerful cooling and targeted cooling.

Now you have determined that a Vortex Tube is right for you, you’ll need to decide between our two different series: 32XX and 34XX. The difference between the two model types comes down to the Cold Fraction, which is determined by where the Control Valve is positioned. When you open the Control Valve (by turning it counterclockwise, as shown by the blue arrow in the photo to the right), it decreases the Cold Fraction, which leads to a reduced flow and a significant drop in temperature in the cold air discharge. Conversely, closing the Control Valve (by turning it clockwise, indicated by the red arrow) boosts the cold air flow, but causes a smaller temperature drop. This ability to adjust is crucial for the Vortex Tube’s flexibility.

 You can set the Cold Fraction as low as 20%, which means that a small portion (20% to be precise) of the supply air is sent to the cold end, resulting in a significant temperature drop. On the flip side, you can crank it up to 80%, meaning that most of the supply air heads to the cold end, but the temperature drop won’t be as drastic. Our 34XX Series Vortex Tubes are designed for cold fractions between 20–50 %, while the 32XX Series caters to 50–80 % Cold Fractions.

So how do you select the right model for you? To determine this, you need to know what temperature and flow will best serve your application. For most situations, the ~20°F produced by an 80% cold fraction is sufficiently cold. At this cold fraction, you will get the most flow (80% of the inlet supplied). Applications like welding or brazing benefit from higher flows. When your starting temperature is hundreds of degrees Fahrenheit, there is little difference in blowing -20°F air vs +20°F. What you need is more volume to strip away the heat as quickly as possible. In this instance, a 32XX series is the way to go.

If you need lower flow, or to achieve freezing temperatures, then the 34XX series would be the best choice. A chocolate maker took advantage of the lower flow rates offered by this type of Vortex Tube as they didn’t want the airflow to disturb the surface of the chocolate as it cooled, affecting the finish. The greater temperature drop allowed for rapid cooling without reducing quality.

Vortex Tubes can produce higher levels of noise than our Knives and Amplifiers, so we would always recommend using hot and cold mufflers with them. This will ensure they stay within OSHA sound standards. And just like with all EXAIR products, it’s a good idea to use a pressure regulator with a gauge right where you’re using it. This is especially crucial for Vortex Tubes if you want to get an accurate temperature.

Whatever your cooling application, our Vortex Tubes will likely be able to help. If you would like to discuss it, please give us a call!

Al Wooffitt
Application Engineer

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Super Air Amplifier vs Fan

Published on by Al WooffittLeave a comment

One of the more common applications we work with is cooling. In most instances, the goal is to cool the part as quickly as possible. In order to cool faster, you would think that blowing the coldest air possible would be the best option. Our Vortex Tubes can produce air as cold as -50°F! However, in many instances, more effective cooling will be achieved through larger volumes of air. As long as the ambient air temperature is lower than the target temperature, larger volumes of ambient air will outperform a small volume.

Our Super Air Amplifier is a great option for producing large volumes of laminar (non-turbulent) airflow for minimal compressed air consumption. Using a Coanda profile along with a patented shim, compressed air exits the Amplifier in a manner that generates a low pressure zone, which helps pull in the surrounding ambient air. This creates an amplification ratio of up to 25 times! Due to the laminar output flow having the same speed and direction, it is very effective at removing heat from a target. It also helps keep noise levels down.

The most common, non-compressed air alternative to our Amplifiers is an electric fan. Fans utilize motors and blades to direct air towards their target. When air comes in from behind the fan, the blades push the air forward to the target. This action generates turbulent air flow, as well as a lot of noise. Due to the use of motors, there are parts that can wear out over time, leading to additional maintenance costs over the lifetime of the fan.

Ultimately, when it comes to cooling, what we care about most is how quickly a given solution will get the job done. Is a Super Air Amplifier going to cool faster than a fan? In the video below we put both options to the test. As you will see, the Super Air Amplifier is significantly faster:

If you have a cooling application that you would like to discuss, give us a call!

Al Wooffitt
Application Engineer

Send me an Email
Find us on the Web
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Twitter: @EXAIR_AW